This is a fancy flat-field focusing, holographic grating as opposed to the previously used Rowland gratings.
- Aberration-corrected Laminar-type Replica Diffraction Gratings for flat-field Polychromators in the range of Extreme Ultra-Violet Light(EUV:13nm). Suitable for the next generation of semiconductor lithography.
- Less high order light due to laminar type grooves configuration, Low stray light by holographic manufacturing technology, and high resolution from aspherical waves exposure method .
- Easy to design spectrometers with array-type detectors.
- Suitable for monitoring EUV lights as well as for Emission Spectroscopy
|Classification||Unequally spaced curved-groove laminar-type replica grating *1|
|Blank material||BK-7 or equivalent|
|Center thickness tolerance||±0.5(Ｔ)|
|Grooved area||Total area less 2mm strip around the perimeter|
|Effective area||Total area less 5mm strip around the perimeter|
|Groove density tolerance||±0.5%|
|Scratches and digs||80-50(in accordance with MIL-O-13830A)|
|Temperature||0°C to 50°C|
1:The grating grooves are formed with resign.
Be sure to prevent condensation. Otherwise, it causes significant deterioration of optical characteristics
- Product web site: http://www.shimadzu.com/products/opt/dif/oh80jt0000001nqa.html
- Papers on abberation-corrected gratings:
- 'Mechanically ruled aberration-corrected concave gratings', Tatsuo Harada and Toshiaki Kita, Applied Optics, Vol. 19, Issue 23, pp. 3987-3993 (1980), doi:10.1364/AO.19.003987 http://www.opticsinfobase.org/abstract.cfm?id=24475
- 'Mechanically ruled aberration-corrected concave gratings for a flat-field grazing-incidence spectrograph', Toshiaki Kita, Tatsuo Harada, N. Nakano, and H. Kuroda, Applied Optics, Vol. 22, Issue 4, pp. 512-513 (1983), doi:10.1364/AO.22.000512 http://www.opticsinfobase.org/abstract.cfm?uri=ao-22-4-512
- Proceedings of SPIE Vol.4146(2000) Varied-line-spacing laminar-type holographic grating for the standard soft X-ray flat-filed spectrograph M.Koike et al. DOI: 10.1117/12.406669